Model-guided tuning
Closed-loop impedance control responds to changing plasma loads, with guidance from an individually characterized network.
RF power delivery systems
GammaTrack automatic RF impedance matching networks for semiconductor plasma processing.
300 W–5 kW2 MHz–40.68 MHz
GammaTrack Automatic
Precise, repeatable RF matching
Precision and repeatability
Quality RF matching elements, fine motion control and individual calibration support consistent operation.
Integrated RF measurement
SensVI provides calibrated power and impedance measurements. Load impedance estimation adds visibility into chamber-side conditions.
Specifications
- Power / frequency
- 300 W–5 kW · 2–40.68 MHz
Network selected for the application - Automatic tuning
- Model-guided, closed-loop control
Less than 1 s typical tune time - Positioning
- Sub-pF capable resolution
Depending on capacitor selection - RF measurement
- Real-time voltage, current, phase, power, complex impedance, and VSWR
- Calibration
- Individually calibrated sensing for measurement accuracy and unit-to-unit repeatability
- Pulsed RF
- Synchronized measurements, 5 Hz–10 kHz
- Arc detection
- Fast detection with adjustable thresholds and timing
- Interfaces
- USB ASCII and binary protocols
Other interfaces on request
Typical performance depends on load, network design and configuration. Specifications apply to GammaTrack Automatic.
Designed for plasma etch and deposition, chamber clean and abatement, remote plasma sources, R&D tools, and retrofit programs.
MATCH ANALYSIS50 Ω reference
MATCHEDREFLECTIONΓ 0.008 − j0.006
INPUT IMPEDANCE50.8 − j0.6 Ω
VSWR1.02
Synthetic tuning example50 Ω reference
Network topology, capacitor ranges and ratings, RF connectors and cooling are selected for the application.
Manual configurations are also available, using the same motion controller and high-quality RF matching elements. Tuning is commanded by the host system; automatic-tuning specifications do not apply.
Configuration · monitoring · control
GammaTrack Pilot
Windows software for configuration, monitoring, and control of GammaTrack Automatic. Power trends, tuning controls, and impedance analysis in one view.