Products
RF products for plasma processing equipment—available now and in development.
Available
Impedance matching networks for plasma processing—built for integration, robustness, and real process constraints.
Inline voltage/current sensing to measure RF power and impedance for integration and diagnostics.
In development
RF filtering solutions under development for plasma systems and high-voltage RF environments.
Equipment diagnostics and data analysis platform for RF/plasma subsystems.
Pulsed DC generator concept targeting precise control for specialized plasma processes.
RF generator platform under development for plasma processing applications.
Remote plasma source concept for vacuum line cleaning, chamber clean, and abatement applications.
Directional couplers under development for power/impedance measurement across a broad frequency range.
Air capacitor platform concept targeting fast actuation for low/medium power matching applications.
Air capacitor platform concept targeting low-cost low/medium power matching applications.
High-voltage DC supply platform under development for plasma equipment subsystems.