GammaTrackTM Match Networks — Available Now

Precision
Plasma & RF Solutions

We design and manufacture RF subsystems and plasma process equipment for semiconductor fabrication and industrial plasma applications.

  • Manual and auto-match configurations with integrated SensVITM sensing
  • High-performance stepper motors with femtofarad-level step accuracy
  • Advanced DSP and proprietary tuning algorithms for fast, stable matching
  • Serial CLI over FS USB with customizable fieldbus options
Featured Product
GammaTrackTM Match Networks

Impedance matching networks for semiconductor fabrication and industrial plasma applications — manual and auto-match configurations.

Power
300 W – 5 kW
Frequency
2 MHz – 40.68 MHz
Control
Serial CLI, Fieldbus
Sensing
Integrated SensVITM
Customizable for Analog/Digital IO, EtherCAT, DeviceNet, and Modbus TCP.

Engineering Approach

We focus on robust architecture and seamless integration. Provide your RF chain and control requirements — we deliver a precise solution.

Precision Actuation
High-performance stepper motors with femtofarad-level capacitance step resolution.
Advanced DSP & Tuning
Proprietary signal processing and tuning algorithms for fast, stable, plug-and-play matching.
Integrated RF Telemetry
SensVITM technology for real-time power and impedance monitoring.
Flexible Communications
Serial CLI over FS USB standard, with EtherCAT, DeviceNet, and Modbus TCP options.

Engagement Model

A streamlined, engineering-driven path from initial inquiry to delivery.

1. Discovery
Define power, frequency, interface, and mechanical constraints.
2. Architecture
Hardware and interface alignment, followed by initial prototyping.
3. Verification
Rigorous performance, robustness, and integration testing.
4. Deployment
Delivery with comprehensive documentation and ongoing support.